PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
In this paper we present results of preliminary research of using nitrogen-doped diamond (NDD) films as reflective layer in Fabry-Pérot interferometer. NDD films were deposited on Si substrates by Microwave Plasma Enhanced Chemical Vapor Deposition (MPECVD) with the use of CH4, H2 and N2 gas mixtures. During deposition process methane flow rate varied while nitrogen flow was constant. We performed series of measurements which showed that NDD can be used as a mirror in Fabry-Pérot interferometer. The best signal visibility and repeatability of measurements were obtained for sample made with 3 sccm methane flow rate.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
M. Kosowska, D. Majchrowicz, K. J. Sankaran, M. Ficek , M. Jędrzejewska-Szczerska, M. K. Haenen, "Nitrogen-doped diamond thin films: potential application in Fabry-Pérot interferometer," Proc. SPIE 10716, Saratov Fall Meeting 2017: Optical Technologies in Biophysics and Medicine XIX, 1071614 (26 April 2018); https://doi.org/10.1117/12.2314445