Three surface method of stylus error compensation for aspherical lens measurement in a 3D contact profilometry

Yasunari Nagaike; Toshiki Kumagai; Kenichi Hibino

doi:10.1117/12.2319572

14 September 2018 Three surface method of stylus error compensation for aspherical lens measurement in a 3D contact profilometry

Yasunari Nagaike, Toshiki Kumagai, Kenichi Hibino

Author Affiliations +

Proceedings Volume 10742, Optical Manufacturing and Testing XII; 107420W (2018) https://doi.org/10.1117/12.2319572
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

A new calibration method is proposed to separate the profile error caused by the sphericity of the scanning stylus in 3- dimensional contact profilometry. To reduce uncertainty in surface profile measurements, compensation of the stylus sphericity has become a critical issue. In optical flat testing, the three-flat method, which can separate the reference error from the measured deviations, is well known. Although there are also several methods of calibration of the stylus sphericity in contact profilometry, to extract the error precisely remains a challenge. Here we consider a new algorithm for this that uses four measurements including new combinations of the two styluses. The algorism yields four deviation data of the sum of the object profile and the stylus sphericity. With this method, we can extract the surface profile, while keeping the stylus error minimum.

Conference Presentation

Citation Download Citation

Yasunari Nagaike, Toshiki Kumagai, and Kenichi Hibino "Three surface method of stylus error compensation for aspherical lens measurement in a 3D contact profilometry", Proc. SPIE 10742, Optical Manufacturing and Testing XII, 107420W (14 September 2018); https://doi.org/10.1117/12.2319572

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