Minimizing the Abbe-offset in interferometric radius metrology

Axel Wiegmann; Markus Lotz; Torsten Mai; Ulrike Fuchs

doi:10.1117/12.2321102

18 August 2018 Minimizing the Abbe-offset in interferometric radius metrology

Axel Wiegmann, Markus Lotz, Torsten Mai, Ulrike Fuchs

Proceedings Volume 10749, Interferometry XIX; 107490W (2018) https://doi.org/10.1117/12.2321102
Event: SPIE Optical Engineering + Applications, 2018, San Diego, California, United States

Abstract

For accurate radius of curvature measurements of spherical specimens on an interferometric radius bench, the axial displacement between the cat’s eye position and the confocal position needs to be measured at the height of the optical axis of the form measuring interferometer. We propose an alignment technique which allows for the alignment of the Abbe-offset well below 100 μm within a few seconds based on fringe nulling. The alignment technique bases on a special designed optical element and a pre-adjustment procedure. The implementation of the alignment technique in a radius measurement setup with a repeatability of 30 nm will be shown.

Citation Download Citation

Axel Wiegmann, Markus Lotz, Torsten Mai, and Ulrike Fuchs "Minimizing the Abbe-offset in interferometric radius metrology", Proc. SPIE 10749, Interferometry XIX, 107490W (18 August 2018); https://doi.org/10.1117/12.2321102

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