Fabrication of Ta based absorber EUV mask with SRAF

Keiko Morishita; Kosuke Takai; Kenji Masui; Takashi Kamo; Tsukasa Abe; Yasutaka Morikawa; Naoya Hayashi

doi:10.1117/12.2503150

12 June 2018 Fabrication of Ta based absorber EUV mask with SRAF

Keiko Morishita, Kosuke Takai, Kenji Masui, Takashi Kamo, Tsukasa Abe, Yasutaka Morikawa, Naoya Hayashi

Proceedings Volume 10807, Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology; 108070F (2018) https://doi.org/10.1117/12.2503150
Event: Photomask Japan 2018, 2018, Yokohama, Japan

Abstract

With shrinkage of device pattern, optical proximity correction (OPC) will be used for EUV lithography, which leads to need sub resolution assist features (SRAF) on EUV mask. Currently, it is difficult to fabricate EUV mask with SRAF of sub-30nm using conventional resist mask process stably. Moreover, it is necessary to improve line width roughness (LWR) of mask absorber pattern for achieving the lithographic specifications beyond hp15nm patterning. In this paper, in order to meet the requirements of Ta based absorber EUV mask with SRAF, mask fabrication process using new structure blank is studied for sub-30nm SRAF patterning and for improved LWR of primary feature. New mask process using new blank with thinner resist and Cr based hard mask was developed. By using new mask process, resolution of absorber pattern was achieved to 30nm for SRAF patterning, and LWR was improved comparing with conventional process.

Citation Download Citation

Keiko Morishita, Kosuke Takai, Kenji Masui, Takashi Kamo, Tsukasa Abe, Yasutaka Morikawa, and Naoya Hayashi "Fabrication of Ta based absorber EUV mask with SRAF", Proc. SPIE 10807, Photomask Japan 2018: XXV Symposium on Photomask and Next-Generation Lithography Mask Technology, 108070F (12 June 2018); https://doi.org/10.1117/12.2503150

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KEYWORDS

Photomasks

Line width roughness

Extreme ultraviolet

SRAF

Extreme ultraviolet lithography

Tantalum

Scanning electron microscopy

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