On the metrology of the MSF errors

Olga Kukso; Rolf Rascher; Rainer Börret; Mario Pohl

doi:10.1117/12.2318675

7 August 2018 On the metrology of the MSF errors

Olga Kukso, Rolf Rascher, Rainer Börret, Mario Pohl

Proceedings Volume 10829, Fifth European Seminar on Precision Optics Manufacturing; 108290F (2018) https://doi.org/10.1117/12.2318675
Event: Fifth European Seminar on Precision Optics Manufacturing, 2018, Teisnach, Germany

Abstract

The aim of our research is to study middle spatial frequency errors (MSFE) on optical surfaces. We investigate the surfaces after all manufacturing processes to find out the main affecting factors and to choose the proper processing parameters to minimize the size of the errors. In this paper we describe some middle spatial frequency errors, which occur during grinding. As there are limited possibilities to measure ground surfaces, their analysis from the point of measurement is most difficult. Therefore, it is of utmost importance to optimally organize the measurement guaranteeing sufficient data for the reconstruction of the toolpath and avoidance of aliasing effects. In the paper discuss possible classifications and some difficulties during measuring of grinded surfaces.

Citation Download Citation

Olga Kukso, Rolf Rascher, Rainer Börret, and Mario Pohl "On the metrology of the MSF errors", Proc. SPIE 10829, Fifth European Seminar on Precision Optics Manufacturing, 108290F (7 August 2018); https://doi.org/10.1117/12.2318675

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