Author Affiliations +
Hideki Hirayama,1 Yukio Kashima,1,2 Yasuhiro Watanabe,3 Tomohiko Shibata,3 Noritoshi Maeda,1 Masafumi Jo,1 Eriko Matsuura,1,2 Takeshi Iwai,4 Mitsunori Kokubo,5 Takaharu Tashiro,5 Kanji Furuta,6 Ryuichiro Kamimura,6 Tamato Osada,6 Hideki Takagi,7 Yuuichi Kurashima,7 Yasushi Iwaisako,8 Tsugumu Nagano9
1RIKEN (Japan)
2Marubun Corp. (Japan)
3DOWA Electronics Materials Co., Ltd. (Japan)
4Tokyo Ohka Kogyo Co., Ltd. (Japan)
5Toshiba Machine Co., Ltd. (Japan)
6ULVAC, Inc. (Japan)
7National Institute of Advanced Industrial Science and Technology (Japan)
8Nippon Tungsten Co., Ltd. (Japan)
9Dai Nippon Printing Co., Ltd. (Japan)