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Due to small refractive change, it is difficult to obtain high confined glass integrated waveguide. A proposed solution is to make firstly a planar waveguide by ion exchanged and then to use an optical grade dicing to realize two separated grooves. The cutting and the polishing of the glass are made at the same time. Monomode ridge waveguide with a smallest width of 4 μm and a height of tens micrometers are characterized, either in the near-infrared domain or in the visible domain. The propagation losses can be smaller than 1 dB/cm with fiber coupling losses around 2 dB depending on the fiber used to excite the waveguide.
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A. Morand, Y. Kaur, M. Gri, G. Ardila , P. Benech, "Glass integrated optic waveguides combining optical grade dicing and ion-exchanged planar waveguide ," Proc. SPIE 10921, Integrated Optics: Devices, Materials, and Technologies XXIII, 109210I (4 March 2019); https://doi.org/10.1117/12.2507530