Characterization and fabrication of monolithic two-section mid-IR quantum cascade lasers (Conference Presentation)

Kamil Pierscinski; Dorota Pierścińska; Aleksandr Kuźmicz; Krzysztof Chmielewski; Grzegorz Sobczak; Piotr Gutowski; Maciej Bugajski

doi:10.1117/12.2509537

13 March 2019 Characterization and fabrication of monolithic two-section mid-IR quantum cascade lasers (Conference Presentation)

Kamil Pierscinski, Dorota Pierścińska, Aleksandr Kuźmicz, Krzysztof Chmielewski, Grzegorz Sobczak, Piotr Gutowski, Maciej Bugajski

Author Affiliations +

Proceedings Volume 10939, Novel In-Plane Semiconductor Lasers XVIII; 109391N (2019) https://doi.org/10.1117/12.2509537
Event: SPIE OPTO, 2019, San Francisco, California, United States

Abstract

The paper focuses on the design, fabrication and characterization of monolithic, coupled cavity two-section quantum cascade lasers. The devices were fabricated by reactive ion etching from InP-based heterostructure designed for emission in 9.x micrometer range. To make the device attractive for sensing applications, the idea of the coupled-cavity device was employed, giving the possibility of single longitudinal mode operation. We have previously presented devices fabricated by means of focused ion beam post-processing. However, FIB etching is challenging and time-consuming. In order to overcome the relatively low throughput of the FIB process, in this work, gaps separating sections were defined by dry etching during the fabrication process. Careful optimization of the dry etching process resulted in very good control of gap geometry. Quality of mirrors formed by RIE did not introduce high scattering loss into the cavity, as the threshold current density was not increased significantly. Devices routinely exhibited side mode suppression ratio of more than 20 dB. Approach to fabricate two-section devices by dry etching resulted in improved yield as well as high repeatability of the performance of individual devices. Monolithic, electrically isolated, two-section devices were also fabricated and characterized. We will present a comparison of the performance of different designs and discuss their characteristics, fabrication challenges and stability against operating conditions.

Conference Presentation

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Kamil Pierscinski, Dorota Pierścińska, Aleksandr Kuźmicz, Krzysztof Chmielewski, Grzegorz Sobczak, Piotr Gutowski, and Maciej Bugajski "Characterization and fabrication of monolithic two-section mid-IR quantum cascade lasers (Conference Presentation)", Proc. SPIE 10939, Novel In-Plane Semiconductor Lasers XVIII, 109391N (13 March 2019); https://doi.org/10.1117/12.2509537

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KEYWORDS

Quantum cascade lasers

Mid-IR

Dry etching

Reactive ion etching

Etching

Heterojunctions

Ion beams

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