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Charles S. Bevis, Robert Karl Jr., Bin Wang, Peter Johnsen, Michael Tanksalvala, Christina Porter, Yuka Esashi, Henry Kapteyn, "Progress on sub-wavelength nanoimaging with a coherent tabletop EUV source (Conference Presentation)," Proc. SPIE 10959, Metrology, Inspection, and Process Control for Microlithography XXXIII, 109590W (26 March 2019); https://doi.org/10.1117/12.2517026