Optomechanical impact sensor with photonic crystal structures

Ogulcan E. Orsel; Mertcan Erdil; Cenk Yanik; Serdar Kocaman

doi:10.1117/12.2529373

5 September 2019 Optomechanical impact sensor with photonic crystal structures

Ogulcan E. Orsel, Mertcan Erdil, Cenk Yanik, Serdar Kocaman

Proceedings Volume 11081, Active Photonic Platforms XI; 110812O (2019) https://doi.org/10.1117/12.2529373
Event: SPIE Nanoscience + Engineering, 2019, San Diego, California, United States

Abstract

We present an optomechanical impact sensor, designed by the utilization of a 2D rod-type photonic crystal (PhC) cavity. The PhC cavity is sandwiched by perfect electrical conductor (PEC) boundaries with an air slot between the top of the PhC rods and the bottom of the top PEC layer. Strong light localization in the air slot region makes the PhC cavity characteristics highly sensitive to the air slot width, leading to optomechanical applications such as impact sensing. A suspended mechanical gold membrane, as a replacement of PEC layers for practical realizations, is designed to sense impact acceleration. In the presence of an impact, the mechanical structure deflects resulting in a change in the air slot height, which in turn, tunes the resonant wavelength of the PhC cavity. Calculations show that 16.6 μs response time, much faster than the commercially available ones (around 200 ms), is possible.

Citation Download Citation

Ogulcan E. Orsel, Mertcan Erdil, Cenk Yanik, and Serdar Kocaman "Optomechanical impact sensor with photonic crystal structures", Proc. SPIE 11081, Active Photonic Platforms XI, 110812O (5 September 2019); https://doi.org/10.1117/12.2529373

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KEYWORDS

Gold

Photonic crystals

Sensors

Waveguides

Scattering

Silicon

Dielectrics

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