Paper
24 June 2019 Technological line for creation and research of diffractive optical elements
Nikolay L. Kazanskiy, Roman V. Skidanov
Author Affiliations +
Proceedings Volume 11146, Optical Technologies for Telecommunications 2018; 111460W (2019) https://doi.org/10.1117/12.2527274
Event: XVI International Scientific and Technical Conference on Optical Technologies in Telecommunications, 2018, Ufa, Russian Federation
Abstract
We report on the creation and use of a unique object of scientific infrastructure – a technological line designed to create and study diffractive optical elements (DOEs). The technological line is a key element of the Center for Collective Use of Equipment "Diffractive Optics and Nanophotonics", created by joint efforts of scientists of Samara University and the Image Processing Systems Institute of the Russian Academy of Sciences. The line includes both the purchased equipment and software, and unique in-house developments. The line covers all stages of DOE creation: from calculation and modeling to experimental research, including development and testing of DOE-based devices.
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Nikolay L. Kazanskiy and Roman V. Skidanov "Technological line for creation and research of diffractive optical elements", Proc. SPIE 11146, Optical Technologies for Telecommunications 2018, 111460W (24 June 2019); https://doi.org/10.1117/12.2527274
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Cited by 21 scholarly publications.
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KEYWORDS
Diffractive optical elements

Chromium

Optical lithography

Diffraction gratings

Hyperspectral imaging

Optical design

Photoresist materials

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