Simulating The Profilometric Measurement Using A Computer Generated Profile

Bernd Harnisch; Horst Truckenbrodt

doi:10.1117/12.961256

3 April 1989 Simulating The Profilometric Measurement Using A Computer Generated Profile

Bernd Harnisch, Horst Truckenbrodt

Proceedings Volume 1121, Interferometry '89; (1989) https://doi.org/10.1117/12.961256
Event: Interferometry '89, 1989, Warsaw, Poland

Abstract

A correlated profile with normal distributed ordinates was computer-generated and the interferometrical measuring process of surface microprofilometry was simulated for a simultaneously measuring interference microscope with a CCD-row and and a profilometer measuring point-by-point. The dependence of the short and high spatial frequency bandlimit on the measured profile and the calculated roughness parameters and statistical functions are shown.

Citation Download Citation

Bernd Harnisch and Horst Truckenbrodt "Simulating The Profilometric Measurement Using A Computer Generated Profile", Proc. SPIE 1121, Interferometry '89, (3 April 1989); https://doi.org/10.1117/12.961256

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