Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Fabian Schwarz; Frank Senger; Jörg Albers; Pauline Malaurie; Christian Janicke; Leon Pohl; Felix Heinrich; Dirk Kaden; Hans-Joachim Quenzer; Fabian Lofink; Andreas Bahr; Thomas von Wantoch; Ulrich Hofmann

doi:10.1117/12.2546035

28 February 2020 Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR

Fabian Schwarz, Frank Senger, Jörg Albers, Pauline Malaurie, Christian Janicke, Leon Pohl, Felix Heinrich, Dirk Kaden, Hans-Joachim Quenzer, Fabian Lofink, Andreas Bahr, Thomas von Wantoch, Ulrich Hofmann

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Proceedings Volume 11293, MOEMS and Miniaturized Systems XIX; 1129309 (2020) https://doi.org/10.1117/12.2546035
Event: SPIE OPTO, 2020, San Francisco, California, United States

Abstract

Presented here is the world’s first resonant 1D MEMS mirror achieving mechanical scanning angles exceeding ±45° and thus providing a field of view of up to 180°. The MEMS scanner features a 2 mm x 4 mm ellipsoid mirror plate and oscillates at a scan frequency of about 1.5 kHz. Integrated sensors and closed-loop control allow for an accurate position detection below 0.1°. To achieve the scan angles as well as to guarantee long lifetime and reliability, the MEMS mirror is hermetically sealed on wafer level by a dedicated glass cover and operated in vacuum.

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Fabian Schwarz, Frank Senger, Jörg Albers, Pauline Malaurie, Christian Janicke, Leon Pohl, Felix Heinrich, Dirk Kaden, Hans-Joachim Quenzer, Fabian Lofink, Andreas Bahr, Thomas von Wantoch, and Ulrich Hofmann "Resonant 1D MEMS mirror with a total optical scan angle of 180° for automotive LiDAR", Proc. SPIE 11293, MOEMS and Miniaturized Systems XIX, 1129309 (28 February 2020); https://doi.org/10.1117/12.2546035

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