High-NA EUV lithography exposure tool: program progress

Jan Van Schoot; Eelco van Setten; Kars Troost; Sjoerd Lok; Judon Stoeldraijer; Rudy Peeters; Jos Benschop; Joerg Zimmerman; Paul Graeupner; Lars Wischmeier; Peter Kuerz; Winfried Kaiser

doi:10.1117/12.2551491

23 March 2020 High-NA EUV lithography exposure tool: program progress

Jan Van Schoot, Eelco van Setten, Kars Troost, Sjoerd Lok, Judon Stoeldraijer, Rudy Peeters, Jos Benschop, Joerg Zimmerman, Paul Graeupner, Lars Wischmeier, Peter Kuerz, Winfried Kaiser

Author Affiliations +

Proceedings Volume 11323, Extreme Ultraviolet (EUV) Lithography XI; 1132307 (2020) https://doi.org/10.1117/12.2551491
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

While EUV systems equipped with a 0.33 Numerical Aperture (NA) lens are entering high volume manufacturing, ASML and ZEISS are in parallel ramping up their activities on an EUV exposure tool with an NA of 0.55. The intent of this high-NA scanner, targeting a resolution of 8nm, is to extend Moore’s law throughout the next decade. The high-NA optical system, together with the developments in mask and resist, provides an increased contrast, key to control stochastic contributions to EPE and error rate of printing defects. A novel lens design, capable of providing the required NA, has been identified; this lens will be paired with new, faster stages and more accurate sensors enabling the tight focus and overlay control needed for future process nodes. Impact on system architecture and proposed solutions are described in this paper. In addition, we give a status update on the developments at ZEISS and ASML.

Citation Download Citation

Jan Van Schoot, Eelco van Setten, Kars Troost, Sjoerd Lok, Judon Stoeldraijer, Rudy Peeters, Jos Benschop, Joerg Zimmerman, Paul Graeupner, Lars Wischmeier, Peter Kuerz, and Winfried Kaiser "High-NA EUV lithography exposure tool: program progress", Proc. SPIE 11323, Extreme Ultraviolet (EUV) Lithography XI, 1132307 (23 March 2020); https://doi.org/10.1117/12.2551491

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