Dielectric metasurfaces for shaping optical fields: from deep-UV to the terahertz (Conference Presentation)

Amit Kumar Agrawal

doi:10.1117/12.2553086

24 March 2020 Dielectric metasurfaces for shaping optical fields: from deep-UV to the terahertz (Conference Presentation)

Amit Kumar Agrawal

Author Affiliations +

Proceedings Volume 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020; 1132415 (2020) https://doi.org/10.1117/12.2553086
Event: SPIE Advanced Lithography, 2020, San Jose, California, United States

Abstract

We demonstrate the versatility of dielectric metasurfaces for spatiotemporal shaping of optical fields, and discuss fabrication and material constraints for their applications as flat, ultrathin optical elements across the entire electromagnetic spectrum.

Conference Presentation

Citation Download Citation

Amit Kumar Agrawal "Dielectric metasurfaces for shaping optical fields: from deep-UV to the terahertz (Conference Presentation)", Proc. SPIE 11324, Novel Patterning Technologies for Semiconductors, MEMS/NEMS and MOEMS 2020, 1132415 (24 March 2020); https://doi.org/10.1117/12.2553086

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