The full aperture processing technical research in fabricating large sapphire window element

Heng Zhu; Heng Zhao M.D.; Zhi-gang Li M.D.; Ding-yao Yan; Ping Ma D.D.S.

doi:10.1117/12.2553184

31 January 2020 The full aperture processing technical research in fabricating large sapphire window element

Heng Zhu, Heng Zhao M.D., Zhi-gang Li M.D., Ding-yao Yan, Ping Ma D.D.S.

Proceedings Volume 11427, Second Target Recognition and Artificial Intelligence Summit Forum; 1142746 (2020) https://doi.org/10.1117/12.2553184
Event: Second Target Recognition and Artificial Intelligence Summit Forum, 2019, Changchun, China

Abstract

This article mainly take the research in controlling the parameters in the full aperture fine grinding and polishing stage of the 350mm×300mm×10mm size sapphire window. In the period of full aperture fine grinding period ,by adjusting the grinding parameters, the whole aperter parallel error of the sapphire window conversed to the level of below 3".In the period of full aperture polishing period , by adjusting the polishing parameters including the vaccum adsorbing parameterm, with those measures the wavefront error conversed to the PV value of 2λ(λ=632.8nm), the whole aperture parallel error of the sapphire window conversed to the level of below 3", and the inside arbitrary Φ100mm aperture’s parallel error also conversed to the level of below 3", the roughness of the polishing face attained to the value Rq≤2nm.Through the technical research in the full aperter processing of the sapphire window , the wavefront error, the parallel error and the surface roughness are well controlled which provide the fine results import in the fine sub-aperture polishing period.

Citation Download Citation

Heng Zhu, Heng Zhao M.D., Zhi-gang Li M.D., Ding-yao Yan, and Ping Ma D.D.S. "The full aperture processing technical research in fabricating large sapphire window element", Proc. SPIE 11427, Second Target Recognition and Artificial Intelligence Summit Forum, 1142746 (31 January 2020); https://doi.org/10.1117/12.2553184

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