High-Resolution Fourier Transform Spectroscopy: Line Widths And Line Shapes Of Spectral Lines Emitted From Helium And Mixed-Gas Inductively Coupled Plasmas

Akbar Montaser; I. Ishii; B. A. Palmer; L. R. Layman; D. E. Hof

doi:10.1117/12.969569

1 December 1989 High-Resolution Fourier Transform Spectroscopy: Line Widths And Line Shapes Of Spectral Lines Emitted From Helium And Mixed-Gas Inductively Coupled Plasmas

Akbar Montaser, I. Ishii, B. A. Palmer, L. R. Layman, D. E. Hof

Author Affiliations +

Proceedings Volume 1145, 7th Intl Conf on Fourier Transform Spectroscopy; (1989) https://doi.org/10.1117/12.969569
Event: Seventh International Conference on Fourier and Computerized Infrared Spectroscopy, 1989, Fairfax, VA, United States

Abstract

Previous studies of line widths and shapes of spectral lines emitted from the inductively coupled plasmas (ICP) have concentrated on plasmas sustained in pure argon [1]. For the present study, we used the Los Alamos Fourier transform spectrometer to estimate line widths and line shapes of Fe I lines emitted from helium and argon-nitrogen ICP discharges. The effect of gas composition and plasma operating conditions on widths and shapes of the spectral lines were examined. Line widths and line shapes of Fe lines were compared with those of argon and helium for Ar ICP and He ICP discharges. Results were used to calculate Doppler temperatures and electron number densities of the cited plasmas.

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Akbar Montaser, I. Ishii, B. A. Palmer, L. R. Layman, and D. E. Hof "High-Resolution Fourier Transform Spectroscopy: Line Widths And Line Shapes Of Spectral Lines Emitted From Helium And Mixed-Gas Inductively Coupled Plasmas", Proc. SPIE 1145, 7th Intl Conf on Fourier Transform Spectroscopy, (1 December 1989); https://doi.org/10.1117/12.969569

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