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23 August 2020 Optical properties of aluminum oxide-copper dielectric-metal nanocomposite thin films deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)
Jacob H. Sands, Nobuhiko P. Kobayashi, Brian Giraldo, Brandon Cheney, David M. Fryauf
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Proceedings Volume 11465, Low-Dimensional Materials and Devices 2020; 114650X (2020) https://doi.org/10.1117/12.2569753
Event: SPIE Nanoscience + Engineering, 2020, Online Only
Abstract
Depositing thin films is often limited to a specific deposition process by which precursors are transported and reacted in a deposition environment. In other words, a deposition environment in which two deposition processes are unified should offer a new perception of devising a thin film structure, which galvanizes our combining atomic layer deposition (ALD) and magnetron sputtering (SPU) in a single chamber – sputtering atomic layer augmented deposition (SALAD). The SALAD system offers advantages of both ALD capable of delivering precursor precisely and accurately and SPU versatile in choosing chemical elements. In this paper, the SALAD system is employed to deposit nanocomposites consisting of multiple pairs of an aluminum oxide thin film deposited by ALD and a copper thin film deposited by SPU. Optical properties collected from the nanocomposites show distinctive dispersion features to which the effective medium approximation does not seem to simply apply.
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Jacob H. Sands, Nobuhiko P. Kobayashi, Brian Giraldo, Brandon Cheney, and David M. Fryauf "Optical properties of aluminum oxide-copper dielectric-metal nanocomposite thin films deposited by Sputtering Atomic Layer Augmented Deposition (SALAD)", Proc. SPIE 11465, Low-Dimensional Materials and Devices 2020, 114650X (23 August 2020); https://doi.org/10.1117/12.2569753
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KEYWORDS
Aluminum
Nanocomposites
Optical properties
Sputter deposition
Thin film deposition
Thin films
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