Force and pressure analysis during overarm polishing

Michael F. Benisch; Oliver Fähnle; Rolf Rascher; Werner Bogner

doi:10.1117/12.2564903

8 July 2020 Force and pressure analysis during overarm polishing

Michael F. Benisch, Oliver Fähnle, Rolf Rascher, Werner Bogner

Proceedings Volume 11478, Seventh European Seminar on Precision Optics Manufacturing; 114780H (2020) https://doi.org/10.1117/12.2564903
Event: Seventh European Seminar on Precision Optics Manufacturing, 2020, Teisnach, Germany

Abstract

The Preston-equation implies, that, besides the relative speed υ_rel and a specific constant K_P, the pressure p plays a significant role for the removal rate when polishing an optical component. This paper demonstrates a possibility for a qualitative evaluation of the pressure distribution before the polishing process. A pressure-sensitive foil is used as a gauge for pressure measurement. The effectiveness of this measuring method is explained. Specific weaknesses and limitations in the use of these foils are discussed. A method for an integrated evaluation of the pressure on different spots of the polishing pad is proposed at the end of the paper.

Citation Download Citation

Michael F. Benisch, Oliver Fähnle, Rolf Rascher, and Werner Bogner "Force and pressure analysis during overarm polishing", Proc. SPIE 11478, Seventh European Seminar on Precision Optics Manufacturing, 114780H (8 July 2020); https://doi.org/10.1117/12.2564903

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