Characterization of groove density variation of VLS gratings with ALS XROL LTP-II in different operation modes

Ian Lacey; Valeriy V. Yashchuk

doi:10.1117/12.2568705

21 August 2020 Characterization of groove density variation of VLS gratings with ALS XROL LTP-II in different operation modes

Ian Lacey, Valeriy V. Yashchuk

Author Affiliations +

Proceedings Volume 11492, Advances in Metrology for X-Ray and EUV Optics IX; 114920D (2020) https://doi.org/10.1117/12.2568705
Event: SPIE Optical Engineering + Applications, 2020, Online Only

Abstract

The long trace profiler, LTP-II, available at the Advanced Light Source (ALS) X-ray Optics Laboratory (XROL), was recently upgraded by replacing a multimode diode laser light source with a single-mode, wavelength-stabilized, fibercoupled diode laser system. The upgrade enables us to reliably characterize the lateral variation of groove density of variable-line-spacing (VLS) x-ray diffraction gratings. Here, we discuss the LTP-II performance with an example of measurements with a VLS grating with the groove density at the grating center of 300 lines/mm. For the measurements, we use the LTP-II in two different operation arrangements, the single Gaussian beam and the pencil beam interferometer arrangements. For each operation arrangement, we apply two data processing algorithms: with calculating the centroid position and with determining the position of a characteristic features of the detected beam intensity distributions. We discuss the observed strong correlation between the LTP-II modes of operation and the resulted (extracted) groove density variations. We also speculate on possible origin of the correlation.

Citation Download Citation

Ian Lacey and Valeriy V. Yashchuk "Characterization of groove density variation of VLS gratings with ALS XROL LTP-II in different operation modes", Proc. SPIE 11492, Advances in Metrology for X-Ray and EUV Optics IX, 114920D (21 August 2020); https://doi.org/10.1117/12.2568705

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $17.00

Non-members: $21.00 ADD TO CART

PROCEEDINGS
16 PAGES

DOWNLOAD PAPER SAVE TO MY LIBRARY

GET CITATION

RIGHTS & PERMISSIONS

Get copyright permission Get copyright permission on Copyright Marketplace

KEYWORDS

Diffraction gratings

Diffraction

Error analysis

Data processing

Light sources

Spatial resolution

X-ray diffraction

Keywords/Phrases

Search In:

Publication Years