Scalable nanotube-microbolometer technology with pixel pitches from 12 down to 6 µm

M. Michel; S. Weyers; D. Weiler; S. Blaeser; E. Zakizade; F. Hochschulz; H. Vogt

doi:10.1117/12.2573895

20 September 2020 Scalable nanotube-microbolometer technology with pixel pitches from 12 down to 6 µm

M. Michel, S. Weyers, D. Weiler, S. Blaeser, E. Zakizade, F. Hochschulz, H. Vogt

Proceedings Volume 11537, Electro-Optical and Infrared Systems: Technology and Applications XVII; 1153704 (2020) https://doi.org/10.1117/12.2573895
Event: SPIE Security + Defence, 2020, Online Only

Abstract

Uncooled FIR-imagers decreased in pixel pitch from latest state-of-the-art value of 17 µm to 10 µm. Following this trend of a reduction of pixel size, Fraunhofer IMS provides a manufacturing process for FIR-imagers (IRFPAs) based on a scalable microbolometer technology. Beside conventional approaches of a thermal isolation of microbolometer membranes realized by lateral legs, Fraunhofer IMS developed a manufacturing process for a thermal isolation realized by nanotubes. To demonstrate the scalability of the nanotube-microbolometers the nanotube contact is applied to microbolometer membranes with 12, 10, 8 and 6 µm pixel size on top of a 17 µm digital readout integrated circuit (ROIC). The arrays are sealed by a chip-scale vacuum package to evaluate the microbolometers’ performance by means of a complete IRFPA. Quantitative measurement results for the responsivity as well as qualitative test pictures of the 12, 10 and 8 µm nanotube-microbolometers will be presented. A direct visual comparison in a test scene demonstrates no obvious decrease in sensitivity between 12 and 8 µm. Only at 6 µm pixel size a reduced sensitivity is observed. In summary, a fully working uncooled IRFPA with QQVGA resolution based on a 6 µm nanotube-microbolometer technology is presented here. The scalability of the nanotube-microbolometer technology from state-of-the-art pixel sizes down to 6 µm is demonstrated.

Conference Presentation

Citation Download Citation

M. Michel, S. Weyers, D. Weiler, S. Blaeser, E. Zakizade, F. Hochschulz, and H. Vogt "Scalable nanotube-microbolometer technology with pixel pitches from 12 down to 6 µm", Proc. SPIE 11537, Electro-Optical and Infrared Systems: Technology and Applications XVII, 1153704 (20 September 2020); https://doi.org/10.1117/12.2573895

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