Transparent ZnO nanostructured thin-film flexible UV photodetectors

Yuanjie Li; Zhangcheng Liu

doi:10.1117/12.2572454

10 October 2020 Transparent ZnO nanostructured thin-film flexible UV photodetectors

Yuanjie Li, Zhangcheng Liu

Proceedings Volume 11547, Optoelectronic Devices and Integration IX; 115470Y (2020) https://doi.org/10.1117/12.2572454
Event: SPIE/COS Photonics Asia, 2020, Online Only

Conference Poster

Abstract

In this study, nanostructured ZnO thin film photodetectors have been synthesized on transparent poly(ethylene terephthalate) (PET) and polyimide (PI) flexible substrates by radio frequency sputtering technology. Effect of growth temperature and oxygen flow rate on the crystallinity, optical transparency and light sensitivity of ZnO thin films were systematically investigated. XRD results reveal that ZnO thin films grown on both flexible substrates exhibit (002) c-plane oriented crystallinity. The crystalline quality of ZnO films greatly depends on the surface state of the flexible substrates, substrate temperature as well as oxygen concentration during growth. The average optical transparency is above 85% in the wavelength range of 300-1000 nm for these ZnO film samples on flexible substrates. Photoluminescence properties of ZnO films on both PET and PI substrates show no obvious band-edge emission, but high intensity of emission from defects. XPS results indicate that good stoichiometry composition transfer from the target to the films has been achieved by RF magnetron sputtering. Interdigital electrode (IDE) planar photodetector devices have been fabricated on PI substrates with Ag as the top electrode. The I-V characteristics of flexible ZnO PDs reveal good light detecting response with 3.8×10^-7 A photocurrents at light power current of 40A.

Conference Presentation

Citation Download Citation

Yuanjie Li and Zhangcheng Liu "Transparent ZnO nanostructured thin-film flexible UV photodetectors", Proc. SPIE 11547, Optoelectronic Devices and Integration IX, 115470Y (10 October 2020); https://doi.org/10.1117/12.2572454

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available