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A new algorithm called Single Wavelength Overlay Optimizer (SWOOP) enhances the performance of single-wavelength optical diffraction-based overlay metrology. SWOOP combines statistical learning with a physical model to advance the performance of single-wavelength measurements to that of multi-wavelength measurements. This is achieved by making a set of multi-wavelength measurements on the first wafer during a train phase and extracting the characteristic signature of the overlay inaccuracy at the pupil plane. This inaccuracy signature is then evaluated and removed in real time for single-wavelength measurements, resulting in improved accuracy and robustness to process variation without compromising throughput.
A. Yagil,R. Dirawi,W. L. Lin,A. Volfman,Y. Men,R. Milo,T. Yaziv, andY. Lamhot
"Signal weighted overlay optimizer for scatterometry metrology", Proc. SPIE 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 1161124 (22 February 2021); https://doi.org/10.1117/12.2583866
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A. Yagil, R. Dirawi, W. L. Lin, A. Volfman, Y. Men, R. Milo, T. Yaziv, Y. Lamhot, "Signal weighted overlay optimizer for scatterometry metrology," Proc. SPIE 11611, Metrology, Inspection, and Process Control for Semiconductor Manufacturing XXXV, 1161124 (22 February 2021); https://doi.org/10.1117/12.2583866