Author Affiliations +
Chia Hung Chen,1 Sheng-Tsung Tsao,1 Jie Du,1 Wenkang Song,1 Hongwei Zhu,1 Ji-Ling Hou,2 Longfei Shen,2 Sunny Xia,3 Simon Mathijssen,2 Marc Noot,2 Farzad Farhadzadeh,2 Kimi Yang,3 Xing Ma,3 Zhi-Qiang Tang,3 Jing Wang,2 Yu Liu,3 David Xu,3 Herman Heijmerikx,2 Eason Su,2 Elliott Mc Namara,2 Kaustuve Bhattacharyya2
1ChangXin Memory Technologies, Inc. (China)
2ASML B.V. (Netherlands)
3ASML (China)