High-Precision, Digital, Phase-Stepping Interferometry With Laser Diodes

P. Hariharan

doi:10.1117/12.962735

25 April 1990 High-Precision, Digital, Phase-Stepping Interferometry With Laser Diodes

P. Hariharan

Proceedings Volume 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series; (1990) https://doi.org/10.1117/12.962735
Event: 33rd Annual Technical Symposium, 1989, San Diego, United States

Abstract

The use of a laser diode for phase-stepping interferometry is very attractive, because the wavelength can be shifted by changing the injection current. However, several problems have to be overcome if high precision measurements are to be made. This paper analyses some of the sources of error and shows how they can be controlled.

Citation Download Citation

P. Hariharan "High-Precision, Digital, Phase-Stepping Interferometry With Laser Diodes", Proc. SPIE 1162, Laser Interferometry: Quantitative Analysis of Interferograms: Third in a Series, (25 April 1990); https://doi.org/10.1117/12.962735

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