Advancing integrated photonics and microreactor technologies with ultrafast laser processing

Min Wang; Zhiwei Fang; Jia Qi; Junxia Zhou; Zhe Wang; Rongbo Wu; Renhong Gao; Ni Yao; Sanaul Haque; Saeed Farajollahi; Jintian Lin; Wei Fang; Tao Lu; Wei Chu; Ya Cheng

doi:10.1117/12.2585248

5 March 2021 Advancing integrated photonics and microreactor technologies with ultrafast laser processing

Min Wang, Zhiwei Fang, Jia Qi, Junxia Zhou, Zhe Wang, Rongbo Wu, Renhong Gao, Ni Yao, Sanaul Haque, Saeed Farajollahi, Jintian Lin, Wei Fang, Tao Lu, Wei Chu, Ya Cheng

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Proceedings Volume 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI; 116730W (2021) https://doi.org/10.1117/12.2585248
Event: SPIE LASE, 2021, Online Only

Abstract

We present our latest progresses on the development of integrated photonic devices as well as microfluidic chips of unprecedented characteristics and performances using femtosecond laser micromachining. We demonstrate ultra-high Q microresonators in lithium niobate on insulator (LNOI), on-chip micro-laser and waveguide amplifier, and high-throughput micro-chemical reactor. The achievements are the result of persistent effort on improving the precision and efficiency in ultrafast laser processing.

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Min Wang, Zhiwei Fang, Jia Qi, Junxia Zhou, Zhe Wang, Rongbo Wu, Renhong Gao, Ni Yao, Sanaul Haque, Saeed Farajollahi, Jintian Lin, Wei Fang, Tao Lu, Wei Chu, and Ya Cheng "Advancing integrated photonics and microreactor technologies with ultrafast laser processing", Proc. SPIE 11673, Laser Applications in Microelectronic and Optoelectronic Manufacturing (LAMOM) XXVI, 116730W (5 March 2021); https://doi.org/10.1117/12.2585248

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