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We have demonstrated UV laser photo-polymerization of elastic 2D/3D structures using UV-curable Polydimethylsiloxane (PDMS). In this technique, UV curable PDMS was locally polymerized to fabricate 1D and 2D single layer structures, as well as 3D multi-layer structures with resolution in micrometer-scale and structure dimension in millimeter-scale. In addition, a hybrid technique of aerosol jet printing followed by UV-LDW was developed to realize 2D patterning of thinner UV curable PDMS layer on free-form surface without solvents. In addition, 3D micro/nano processing for fabrication of 3D microfluidic surface-enhanced Raman spectroscopy (SERS) sensors will be presented as a subtractive process using photo-sensitive glass.
Kotaro Obata,Shi Bai, andKoji Sugioka
"Additive and subtractive manufacturing process by hybrid laser material processing", Proc. SPIE 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV, 116960I (5 March 2021); https://doi.org/10.1117/12.2579336
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Kotaro Obata, Shi Bai, Koji Sugioka, "Additive and subtractive manufacturing process by hybrid laser material processing," Proc. SPIE 11696, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XIV, 116960I (5 March 2021); https://doi.org/10.1117/12.2579336