Miniaturization of NIR/SWIR image sensors enabled by thin-film photodiode monolithic integration

Pawel E. Malinowski; Jiwon Lee; Yunlong Li; Epimitheas Georgitzikis; Vladimir Pejovic; Itai Lieberman; Tom Verschooten; Steven Thijs; Orges Furxhi; Paul Heremans; David Cheyns

doi:10.1117/12.2584144

27 March 2021 Miniaturization of NIR/SWIR image sensors enabled by thin-film photodiode monolithic integration

Pawel E. Malinowski, Jiwon Lee, Yunlong Li, Epimitheas Georgitzikis, Vladimir Pejovic, Itai Lieberman, Tom Verschooten, Steven Thijs, Orges Furxhi, Paul Heremans, David Cheyns

Author Affiliations +

Proceedings Volume 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II; 117650V (2021) https://doi.org/10.1117/12.2584144
Event: SPIE AR VR MR, 2021, Online Only

Abstract

In this paper, we present short-wave infrared (SWIR) image sensors with high pixel density. Quantum dot (QD) photodiode stack is monolithically integrated on custom, 130 nm node CMOS readout circuit. State-of-the-art pixel pitch of 1.82 μm is demonstrated in focal plane arrays sensitive at eye-safe region above 1400 nm wavelength. Thin-film photodiode (TFPD) technology will facilitate realization of ultra-compact SWIR sensors for future XR applications, including eye-safe tracking systems and enhanced vision.

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Pawel E. Malinowski, Jiwon Lee, Yunlong Li, Epimitheas Georgitzikis, Vladimir Pejovic, Itai Lieberman, Tom Verschooten, Steven Thijs, Orges Furxhi, Paul Heremans, and David Cheyns "Miniaturization of NIR/SWIR image sensors enabled by thin-film photodiode monolithic integration", Proc. SPIE 11765, Optical Architectures for Displays and Sensing in Augmented, Virtual, and Mixed Reality (AR, VR, MR) II, 117650V (27 March 2021); https://doi.org/10.1117/12.2584144

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