Design and fabrication method of a multi-step diffraction grating

Yuan Yao; Debin Pan; Tingting Dong; Jianbo Wang; Chensheng Wang; Anbing Geng

doi:10.1117/12.2590741

18 March 2021 Design and fabrication method of a multi-step diffraction grating

Yuan Yao, Debin Pan, Tingting Dong, Jianbo Wang, Chensheng Wang, Anbing Geng

Author Affiliations +

Proceedings Volume 11780, Global Intelligent Industry Conference 2020; 117801O (2021) https://doi.org/10.1117/12.2590741
Event: Global Intelligent Industry Conference 2020, 2020, Guangzhou, China

Abstract

Grating interferometers are widely used in many miniaturized sensors requiring displacement measurement, such as microphone and accelerometers, because of its small volume and high measurement accuracy. However, the traditional grating can generate a zeroth-order reflected beam, which results in reduced sensor performance, packaging limitations, and laser instability. In this paper, design and manufacture method of a multi-step phase modulation grating is demonstrated. The application of this multi - step grating interferometer is to modulate the intensity of light of level 0 to level ±1 so as to avoid the return to the laser light so as to improve the system stability. On the other hand, due to the increased testing classes of diffraction efficiency, the SNR of the system is improved.

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Yuan Yao, Debin Pan, Tingting Dong, Jianbo Wang, Chensheng Wang, and Anbing Geng "Design and fabrication method of a multi-step diffraction grating", Proc. SPIE 11780, Global Intelligent Industry Conference 2020, 117801O (18 March 2021); https://doi.org/10.1117/12.2590741

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