A microplasma is defined as a plasma (i.e., a mixture of ions and electrons) with one critical dimension (e.g., depth, or length, or radius) in the mm or the sub-mm (m) range. Over the years, we designed and fabricated a variety of microplasmas using technologies ranging from those borrowed from semiconductor fabrication on crystalline-Silicon substrates to 3D printing on polymeric substrates. In this presentation, the determination of excitation temperatures (Texc) is described. Determination of Texc is important because it is affecting detection limits and is described here.
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