PROCEEDINGS VOLUME 1185
1989 MICROELECTRONIC INTEGRATED PROCESSING CONFERENCES | 10-13 OCTOBER 1989
Dry Processing for Submicrometer Lithography
Editor(s): James A. Bondur, Alan R. Reinberg
Editor Affiliations +
IN THIS VOLUME

1 Sessions, 28 Papers, 0 Presentations, 0 Posters
All Papers  (28)
1989 MICROELECTRONIC INTEGRATED PROCESSING CONFERENCES
10-13 October 1989
Santa Clara, United States
All Papers
James W. Thackeray, John F. Bohland, Edward K. Pavelchek,, George W. Orsula, Andrew W. McCullough, Susan K. Jones, Stephen M. Bobbio
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978041
Charles W. Jurgensen, Eric S. G. Shaqfeh
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978042
S. M. Bobbio, Susan K. Jones, Theodore G. Tessier, Bruce W. Dudley, Batia Cohen, Russell F. Jewett, Arturo Morosoff
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978043
George R. Misium, Cesar M. Garza, Monte A. Douglas, Cecil J. Davis, Robert R. Doering
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978044
Gary F. Doyle
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978045
A. Selino, M. Siegel, R. Lombaerts
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978046
T. D. DuBois, F. M. Tranjan, S. K. Jones, S. M. Bobbio, M. D. Kellam, R. G. Frieser, A. D. Jones
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978047
A. C. Seabra, P. Verdonck, W. L. Xavier, V. Baranauskas
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978048
Gary S. Selwyn, John S. McKillop, Kurt L. Haller
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978049
G. W. Hills, A. S. Harrus, M. J. Thoma
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978050
L. Y. Tsou
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978051
Barbara Haselden, Paula Peavey, Bill Elicson, Tofael Ahmed
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978052
H. Hubner, W. Pilz, G. Belle, M. Franosch
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978053
Richard R. Zito
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978054
D. R. Denison, Chien Chiang, David B. Fraser
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978055
Barbara Vasquez, Harland G. Tompkins, Peter Fejes, Terrance Y. Lee, Laurel Smith
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978056
K. R. Stalder
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978057
O. D. Crisalle, S. R. Keifling, D. E. Seborg, D. A. Mellichamp
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978058
Richard O. Lynch, Richard J. Markle
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978059
Herbert H. Sawin, Evangelos Gogolides
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978060
F. N. Hause, H. J. Stocker, R. O. Lynch
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978061
Scott C. Jackson, Timothy J. Dalton
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978062
Dennis S. Grimard, Fred L. Terry, Jr., Michael E. Elta
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978063
J. Wormhoudt
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978064
Stephen M. Bobbio
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978065
Tobin Fink, Doran D. Smith, W. D. Braddock
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978066
I. W. Wu, R. H. Bruce, M. Koyanagi, T. Y. Huang
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978067
V. G. I. Deshmukh, T. I. Cox, A. J. Hydes, D. A. O. Hope
Proceedings Volume Dry Processing for Submicrometer Lithography, (1990) https://doi.org/10.1117/12.978068
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