Optical monitoring of coating production: correlation of errors and errors self-compensation

Alexander Tikhonravov; Igor Kochikov; Svetlana Sharapova; Anatoly Yagola

doi:10.1117/12.2597765

12 September 2021 Optical monitoring of coating production: correlation of errors and errors self-compensation

Alexander Tikhonravov, Igor Kochikov, Svetlana Sharapova, Anatoly Yagola

Proceedings Volume 11872, Advances in Optical Thin Films VII; 118720Q (2021) https://doi.org/10.1117/12.2597765
Event: SPIE Optical Systems Design, 2021, Online Only

Abstract

It is shown that the previously proposed geometric approach adequately describes the effect of error correlation based on the results of computational manufacturing experiments with the selected type of optical monitoring. The question of a sufficient number of simulation runs is investigated, and it is shown that a reliable estimate of the correlation coefficient describing the strength of the error correlation effect is obtained with a realistic number of computational manufacturing experiments. To investigate the presence of the error self-compensation effect, the error self-compensation coefficient is introduced. Using sets of correlated error vectors obtained in computational manufacturing experiments, the probability density function of the distributions of this coefficient is calculated. To assess the strength of the error self-compensation effect, the estimate is proposed based on a comparison of the influence of correlated and uncorrelated thickness errors.

Conference Presentation

Citation Download Citation

Alexander Tikhonravov, Igor Kochikov, Svetlana Sharapova, and Anatoly Yagola "Optical monitoring of coating production: correlation of errors and errors self-compensation", Proc. SPIE 11872, Advances in Optical Thin Films VII, 118720Q (12 September 2021); https://doi.org/10.1117/12.2597765

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