A modified chromatic confocal system for spectral reflectance measurement

Jiao Bai; Jingwen Li; Gaopeng Xue; Xiaohao Wang; Qian Zhou; Xinghui Li

doi:10.1117/12.2602209

9 October 2021 A modified chromatic confocal system for spectral reflectance measurement

Jiao Bai, Jingwen Li, Gaopeng Xue, Xiaohao Wang, Qian Zhou, Xinghui Li

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Proceedings Volume 11895, Optical Design and Testing XI; 1189508 (2021) https://doi.org/10.1117/12.2602209
Event: SPIE/COS Photonics Asia, 2021, Nantong, JS, China

Abstract

Spectral reflectance plays an important role in the evaluation of the object surface, such as the color, the roughness. A new method is proposed to measure the spectral reflectance at a fixed incident angle. The chromatic confocal displacement sensor is modified with an annular stop to generate a hollow cone beam of incident light on the to-be measured sample surface. With self-reference strategy, the upper and lower envelops are derived from the axial scanning of the dispersion probe, whose minus is named as self-reference spectrum. Thus, the reflectance at every wavelength among the valid dispersion bandwidth can be achieved by comparing the self-reference spectra of the sample surface and a standard mirror with known spectral reflectance. With the proposed method and experimental setup, the spectral reflectance of several metal surfaces is obtained and compared with their theoretical spectral reflectance within ±0.04. It proves that the modified chromatic confocal can provide feasible results for the spectral reflectance measurement.

Citation Download Citation

Jiao Bai, Jingwen Li, Gaopeng Xue, Xiaohao Wang, Qian Zhou, and Xinghui Li "A modified chromatic confocal system for spectral reflectance measurement", Proc. SPIE 11895, Optical Design and Testing XI, 1189508 (9 October 2021); https://doi.org/10.1117/12.2602209

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KEYWORDS

Reflectivity

Confocal microscopy

Colorimetry

Aluminum

Mirrors

Reflection

Light sources

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