Investigation of particle densities of ultrasonic cleaned substrates using laser damage testing methods

Thomas Gischkat; Daniel Schachtler; Zoltan Balogh-Michels; Roelene Botha; André Mocker; Marco Cucinelli; Bernd Eiermann; Sven Günther; Tamara Meinl; Igor Stevanovic; Marcus Denk; Philipp Alder; Michael Berger

doi:10.1117/12.2600632

12 October 2021 Investigation of particle densities of ultrasonic cleaned substrates using laser damage testing methods

Thomas Gischkat, Daniel Schachtler, Zoltan Balogh-Michels, Roelene Botha, André Mocker, Marco Cucinelli, Bernd Eiermann, Sven Günther, Tamara Meinl, Igor Stevanovic, Marcus Denk, Philipp Alder, Michael Berger

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Proceedings Volume 11910, Laser-Induced Damage in Optical Materials 2021; 119101R (2021) https://doi.org/10.1117/12.2600632
Event: SPIE Laser Damage, 2021, Online Only

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Thomas Gischkat, Daniel Schachtler, Zoltan Balogh-Michels, Roelene Botha, André Mocker, Marco Cucinelli, Bernd Eiermann, Sven Günther, Tamara Meinl, Igor Stevanovic, Marcus Denk, Philipp Alder, and Michael Berger "Investigation of particle densities of ultrasonic cleaned substrates using laser damage testing methods", Proc. SPIE 11910, Laser-Induced Damage in Optical Materials 2021, 119101R (12 October 2021); https://doi.org/10.1117/12.2600632

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