Enhanced catalyst mobility in chemically amplified resists

Christopher M. Bottoms; Tanguy Terlier; Gila E. Stein; Manolis Doxastakis

doi:10.1117/12.2613355

25 May 2022 Enhanced catalyst mobility in chemically amplified resists

Christopher M. Bottoms, Tanguy Terlier, Gila E. Stein, Manolis Doxastakis

Author Affiliations +

Proceedings Volume 12055, Advances in Patterning Materials and Processes XXXIX; 1205506 (2022) https://doi.org/10.1117/12.2613355
Event: SPIE Advanced Lithography + Patterning, 2022, San Jose, California, United States

Abstract

In chemically amplified resists (CARs), it is known that catalyst diffusion is accelerated by the deprotection reaction. However, the mechanisms that drive this enhancement are not yet known as it is difficult to probe local changes in polymer chemistry and density during the reaction, as well as their effects on catalyst diffusion, through experiments alone. We examine catalyst diffusion in a model terpolymer CAR, both in the presence and absence of reaction, using a combination of experiments and atomistic simulations. From experiments, we find that deprotection rates are faster than film densification, and that reaction enhances long-time catalyst diffusion lengths by a factor of four. From simulations, we find evidence that catalyst mobility is enhanced in recently reacted regions of the terpolymer. These results provide insight into the origins of accelerated catalyst diffusion during reaction, and will be utilized in the development of physics-informed models of CAR systems.

Conference Presentation

Citation Download Citation

Christopher M. Bottoms, Tanguy Terlier, Gila E. Stein, and Manolis Doxastakis "Enhanced catalyst mobility in chemically amplified resists", Proc. SPIE 12055, Advances in Patterning Materials and Processes XXXIX, 1205506 (25 May 2022); https://doi.org/10.1117/12.2613355

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