Design of a piezoelectric pump with arch cantilever beam vibrator

Yong Zhang; Xiaoliang Wang; Liwei Chen; Yinghao Li; Haiyang Jiang; Qiaosheng Pan

doi:10.1117/12.2611703

19 November 2021 Design of a piezoelectric pump with arch cantilever beam vibrator

Yong Zhang, Xiaoliang Wang, Liwei Chen, Yinghao Li, Haiyang Jiang, Qiaosheng Pan

Author Affiliations +

Proceedings Volume 12059, Tenth International Symposium on Precision Mechanical Measurements; 120590K (2021) https://doi.org/10.1117/12.2611703
Event: Tenth International Symposium on Precision Mechanical Measurements, 2021, Qingdao, China

Abstract

In this paper, a resonant piezoelectric pump is driven by a new type of piezoelectric vibrator is presented. A square piezoelectric vibrator with an arch cantilever beam structure is designed. Four arched cantilever beams are symmetrically distributed at the output end. Through the arch structure design, the stiffness of the cantilever beam is reduced under a certain size. The output displacement of the vibrator is improved and the output flow of the piezoelectric pump is improved. In this paper, the square piezoelectric vibrator is modeled and simulated. The experimental results show that the piezoelectric pump with square vibrator has good output performance. The flow rate reaches a peak of 49.8 ml/min at 505Hz when the driving voltage is 400 V_pp.

Citation Download Citation

Yong Zhang, Xiaoliang Wang, Liwei Chen, Yinghao Li, Haiyang Jiang, and Qiaosheng Pan "Design of a piezoelectric pump with arch cantilever beam vibrator", Proc. SPIE 12059, Tenth International Symposium on Precision Mechanical Measurements, 120590K (19 November 2021); https://doi.org/10.1117/12.2611703

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