Design of AlOx/GaAs high-index contrast subwavelength gratings for 940nm VCSELs

Yan Luo; Ling-Cheng Huang; Yong-Qin Hao

doi:10.1117/12.2603490

24 November 2021 Design of AlOx/GaAs high-index contrast subwavelength gratings for 940nm VCSELs

Yan Luo, Ling-Cheng Huang, Yong-Qin Hao

Author Affiliations +

Proceedings Volume 12065, AOPC 2021: Optical Sensing and Imaging Technology; 120650I (2021) https://doi.org/10.1117/12.2603490
Event: Applied Optics and Photonics China 2021, 2021, Beijing, China

Abstract

High-index contrast subwavelength gratings（HCG）for 940 nm GaAs-based VCSELs were presented. The structural characteristics of TM-HCG is analyzed, especially the influence of the grating parameters on the high reflection band. The 940nm TM-HCG has a large reflection bandwidth up to 188nm (Δ λ / λ 0 = 20%) with its reflectivity more than 99.5% for TM incident light, and reflectivity is less than 67.5% for TE incident light. So the HCG exhibits large high reflectivity bandwidth and polarization selectivity.

Citation Download Citation

Yan Luo, Ling-Cheng Huang, and Yong-Qin Hao "Design of AlOx/GaAs high-index contrast subwavelength gratings for 940nm VCSELs", Proc. SPIE 12065, AOPC 2021: Optical Sensing and Imaging Technology, 120650I (24 November 2021); https://doi.org/10.1117/12.2603490

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