Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver

Sofya V. Malokhatko; Evgeny Yu. Gusev; Oleg A. Ageev; Timofey A. Efimov; Evgeny A. Rassolov; Roman V. Romashko

doi:10.1117/12.2624430

30 January 2022 Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver

Sofya V. Malokhatko, Evgeny Yu. Gusev, Oleg A. Ageev, Timofey A. Efimov, Evgeny A. Rassolov, Roman V. Romashko

Proceedings Volume 12157, International Conference on Micro- and Nano-Electronics 2021; 121570R (2022) https://doi.org/10.1117/12.2624430
Event: International Conference on Micro- and Nano-Electronics 2021, 2021, Zvenigorod, Russian Federation

Abstract

The article presents the results of designing, manufacturing, and studying the resonant properties of a square silicon membrane for use in a fiber-optic acoustic receiver. The dependences of resonant frequency on edge length (6-9 mm) and thickness of the membrane (30-50 μm) are obtained. The geometrical parameters of the membrane satisfying the values of resonant frequency (2-60 kHz), pressure (0.1-14 Pa), and deviation (10 nm) are determined: edge length is 8 mm and thickness is 40-50 μm (9.2-42.3 kHz). A series of square silicon membranes was fabricated by anisotropic wet etching. The amplitude-frequency characteristics of the membranes were experimentally measured using an adaptive holographic interferometer. For a square membrane of 8×8×0.044 m³, the experimentally measured resonant frequency was 10.1 kHz, which is consistent with the results of numerical simulation.

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Sofya V. Malokhatko, Evgeny Yu. Gusev, Oleg A. Ageev, Timofey A. Efimov, Evgeny A. Rassolov, and Roman V. Romashko "Research of resonance frequencies of silicon membranes for a fiber-optic acoustic receiver", Proc. SPIE 12157, International Conference on Micro- and Nano-Electronics 2021, 121570R (30 January 2022); https://doi.org/10.1117/12.2624430

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KEYWORDS

Silicon

Acoustics

Fiber optics

Chemical elements

Interferometers

Receivers

Protactinium

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