Thermodynamic equilibrium state analysis of silicon plasma induced by picosecond laser

Zelin Liu; Chuan Guo; Lei Chen; Minsun Chen; Zhongjie Xu; Guomin Zhao; Hao Liu; Kai Han

doi:10.1117/12.2616219

15 February 2022 Thermodynamic equilibrium state analysis of silicon plasma induced by picosecond laser

Zelin Liu, Chuan Guo, Lei Chen, Minsun Chen, Zhongjie Xu, Guomin Zhao, Hao Liu, Kai Han

Author Affiliations +

Proceedings Volume 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021); 1216636 (2022) https://doi.org/10.1117/12.2616219
Event: Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 2021, Hong Kong, Hong Kong

Abstract

The thermodynamic properties of silicon plasma generated by picosecond laser in vacuum were studied by using spatiotemporally resolved emission spectroscopy technique. Temporal and spatial evolution behavior about plasma has been analyzed. Meanwhile, the temporal and spatial dependence of silicon ions with different charges were examined. Finally, the validity of assuming a local thermodynamic equilibrium (LTE) in the silicon plasma expansion was checked, and the deviation degree of LTE was measured. The results indicate that the assumption was valid only at longer (< 180 ns) delay times in the area z < 4 mm away from the target surface. At the initial stage of plasma expansion, the plasma deviates from LTE due to the sharp decrease of plasma temperature and electron density.

Citation Download Citation

Zelin Liu, Chuan Guo, Lei Chen, Minsun Chen, Zhongjie Xu, Guomin Zhao, Hao Liu, and Kai Han "Thermodynamic equilibrium state analysis of silicon plasma induced by picosecond laser", Proc. SPIE 12166, Seventh Asia Pacific Conference on Optics Manufacture and 2021 International Forum of Young Scientists on Advanced Optical Manufacturing (APCOM and YSAOM 2021), 1216636 (15 February 2022); https://doi.org/10.1117/12.2616219

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