A phase error compensation algorithm for white light phase shift interferometry

Junwen Tan; Jian Gao; Zhuojun Zheng; Lanyu Zhang

doi:10.1117/12.2627448

28 March 2022 A phase error compensation algorithm for white light phase shift interferometry

Junwen Tan, Jian Gao, Zhuojun Zheng, Lanyu Zhang

Author Affiliations +

Proceedings Volume 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications; 12169DE (2022) https://doi.org/10.1117/12.2627448
Event: Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 2021, Kunming, China

Abstract

Due to its sensitivity to noise, the instability of phase-shifting devices and environmental vibration, white light phase shift interferometry is prone to modulation positioning errors and phase errors. This paper proposes a high-precision phase error compensation method, and establishes a white light phase shift interference model with phase error estimation. This method can calculate and compensate the phase error in the classical phase shift algorithm. The simulation results show that the proposed method can effectively improve the accuracy of phase shift interferometry compared with the classical phase shift interferometry algorithm.

Citation Download Citation

Junwen Tan, Jian Gao, Zhuojun Zheng, and Lanyu Zhang "A phase error compensation algorithm for white light phase shift interferometry", Proc. SPIE 12169, Eighth Symposium on Novel Photoelectronic Detection Technology and Applications, 12169DE (28 March 2022); https://doi.org/10.1117/12.2627448

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