Research on nonlinear vibration of cantilever by a nanosecond laser excitation

Tao Sun; Jin Li; Zhaonan Meng; Ziwei Meng; Xingyu Liao

doi:10.1117/12.2648584

14 October 2022 Research on nonlinear vibration of cantilever by a nanosecond laser excitation

Tao Sun, Jin Li, Zhaonan Meng, Ziwei Meng, Xingyu Liao

Proceedings Volume 12343, 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022); 123431P (2022) https://doi.org/10.1117/12.2648584
Event: 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 2022, Qingdao, China

Abstract

Laser thermoelastic actuation is widely used in micro-actuation fields, such as MEMS and MOEMS. The advantage lies in non-contact, non-destructive, easy integration, and mobility. The low energy efficiency of the thermoelastic laser actuation limits its applications in manipulations of millimeters and submillimeters. In this study, we investigate the laser thermoelastic mechanism, and it is demonstrated to be an efficient non-contact way to achieve optical actuation. A millimeter-level nickel cantilever is successfully actuated with large amplitudes (several millimeters) at lower orders resonant frequencies by a nanosecond pulsed laser. The nonlinear modal interacted vibrations of the cantilever are also observed experimentally, the energy transfers from a high-frequency pulsed laser excitation to the low-frequency response of the cantilever. Moreover, we demonstrate that the first-order mode of the cantilever always dominates the nonlinear vibration at far high-frequency excitation, which would benefit the laser actuation control of the cantilever at a higher frequency. Furthermore, this work also presents a laser modulation method for a new widely spaced modal interaction. The results show that the appearance of the low-frequency mode has a slow modulation of the amplitude of the high-frequency mode. This study provides an effective non-contact approach for the optical excitation of the millimeter-level cantilever, empirically investigates the nonlinear features, and enriches applications in fields such as AFM sensing, precise processing and separation of bio-particles/cells, optical manipulation and operation of microrobots, and lab-on-a-chip devices.

Citation Download Citation

Tao Sun, Jin Li, Zhaonan Meng, Ziwei Meng, and Xingyu Liao "Research on nonlinear vibration of cantilever by a nanosecond laser excitation", Proc. SPIE 12343, 2nd International Conference on Laser, Optics and Optoelectronic Technology (LOPET 2022), 123431P (14 October 2022); https://doi.org/10.1117/12.2648584

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KEYWORDS

Pulsed laser operation

Laser energy

Modulation

Laser applications

Metals

Optical simulations

Complex systems

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