Optomechanical cavities in silicon-on-insulator

Jianhao Zhang; Paula Nuño-Ruano; Xavier Le Roux; Eric Cassan; Delphine Marris-Morini; Laurent Vivien; Norberto Daniel Lanzillotti-Kimura; Carlos Ramos

doi:10.1117/12.2647263

17 March 2023 Optomechanical cavities in silicon-on-insulator

Jianhao Zhang, Paula Nuño-Ruano, Xavier Le Roux, Eric Cassan, Delphine Marris-Morini, Laurent Vivien, Norberto Daniel Lanzillotti-Kimura, Carlos Ramos

Author Affiliations +

Proceedings Volume 12424, Integrated Optics: Devices, Materials, and Technologies XXVII; 1242405 (2023) https://doi.org/10.1117/12.2647263
Event: SPIE OPTO, 2023, San Francisco, California, United States

Abstract

Integrated optomechanical cavities allow precise control of optical and mechanical modes and enable strong photonphonon interactions in micron-scale volume, key for the implementation of microwave-photonic oscillators and quantum transducers. Silicon photonics provides low production cost and compatibility with the state-of-art optoelectronic circuitry. Thus, it is particularly interesting for the implementation of on-chip optomechanics. However, silicon has higher stiffness and acoustic velocity than the silica cladding, hampering phonon confinement in silicon-on-insulator (SOI) waveguides. Here, we present our most recent results on SOI optomechanical systems coupling mechanical and guided optical modes. The cavities use silicon pillars with subwavelength period. Strong radiation pressure is exploited to drive the optomechanical coupling. Based on this concept, we experimentally demonstrate the optomechanical coupling between photons and high-quality factor phonons in non-suspended cavities, with a great potential for applications in quantum and classical photonics.

Conference Presentation

Citation Download Citation

Jianhao Zhang, Paula Nuño-Ruano, Xavier Le Roux, Eric Cassan, Delphine Marris-Morini, Laurent Vivien, Norberto Daniel Lanzillotti-Kimura, and Carlos Ramos "Optomechanical cavities in silicon-on-insulator", Proc. SPIE 12424, Integrated Optics: Devices, Materials, and Technologies XXVII, 1242405 (17 March 2023); https://doi.org/10.1117/12.2647263

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