25 April 2023A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The atomic force microscope (AFM)-based nanomachining has the potential for highly customized nanofabrication due to its low cost and tunability. However, the low productivity and issues related to the quality assurance for AFM-based nanomachining impede it from large-scale production due to the extensive experimental study for turning process parameters with time-consuming offline characterizations. This work reports an analytic approach to capturing the AE spectral frequency responses from the nanopatterning process using vibration-assisted AFM-based nanomachining. The experimental case study suggests the presented approach allows characterizations of subtle variations on the AE frequency responses during the nanomachining processes (with overall 93% accuracy), which opens up the chance to explain the variations of the nano-dynamics using the senor-based monitoring approach for vibration-assisted AFM-based nanomachining.
Zimo Wang,Xinchen Wang,Huimin Zhou, andJia Deng
"A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning", Proc. SPIE 12490, Surface Engineering and Forensics, 1249006 (25 April 2023); https://doi.org/10.1117/12.2658809
ACCESS THE FULL ARTICLE
INSTITUTIONAL Select your institution to access the SPIE Digital Library.
PERSONAL Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
The alert did not successfully save. Please try again later.
Zimo Wang, Xinchen Wang, Huimin Zhou, Jia Deng, "A sensor-based analytic approach for predictions of nanomachined surface profile variations via capturing temporal-spectral Acoustic Emission (AE) features for vibration-assisted Atomic Force Microscopic (AFM) based nanopatterning," Proc. SPIE 12490, Surface Engineering and Forensics, 1249006 (25 April 2023); https://doi.org/10.1117/12.2658809