A polarization optical measurement method based on spectroscopic ellipsometer and COMSOL simulation

Huiwen Fang; Jinhong Yang; Meijuan Zhang; Yujiao Wei; Wuji Zhang; Wenguang Li; Shengnan He; Weihua Wang

doi:10.1117/12.2674040

9 March 2023 A polarization optical measurement method based on spectroscopic ellipsometer and COMSOL simulation

Huiwen Fang, Jinhong Yang, Meijuan Zhang, Yujiao Wei, Wuji Zhang, Wenguang Li, Shengnan He, Weihua Wang

Proceedings Volume 12600, International Conference on Optoelectronic Materials and Devices (ICOMD 2022); 126001F (2023) https://doi.org/10.1117/12.2674040
Event: 2022 International Conference on Optoelectronic Materials and Devices, 2022, Chongqing, China

Abstract

The broad-spectrum Mueller matrix ellipsometry can achieve nanometer-scale film structure measurements in the range of visible spectrum by fitting the wide spectral polarization parameters and dispersion of samples. COMSOL can simulate optical processes in multiple physical fields. Therefore, the combination of COMSOL simulation and broad-spectrum ellipsometry is able to achieve high-precision measurement of thin film structures in multi-physical field. In this paper, firstly, the ellipsometry parameters of SiO2 film on silicon substrate are measured by a broad-spectrum ellipsometer. Secondly, the reflection process of SiO2 film on silicon substrate is simulated by COMSOL. Then, the Mueller matrices of the samples were calculated respectively, and the thickness of the SiO2 film was obtained by comparing the matching degree of the two Mueller matrices. Finally, the experimental and simulation results of Mueller matrices M12, M33 and M34 with different thickness of SiO2 film is analyzed and compared comprehensively. The results verify the feasibility of the measurement method combining Mueller matrix ellipsometry with COMSOL simulation, which can broaden the application of multi-physics field measurement of broad-spectrum ellipsometry.

Citation Download Citation

Huiwen Fang, Jinhong Yang, Meijuan Zhang, Yujiao Wei, Wuji Zhang, Wenguang Li, Shengnan He, and Weihua Wang "A polarization optical measurement method based on spectroscopic ellipsometer and COMSOL simulation", Proc. SPIE 12600, International Conference on Optoelectronic Materials and Devices (ICOMD 2022), 126001F (9 March 2023); https://doi.org/10.1117/12.2674040

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available