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27 September 2023 Informing the fabrication of ultraviolet reflection gratings with interferometric measurements
Cecilia R. Fasano, Casey DeRoo, Keri Hoadley, Jared Termini, Fabien Grisé
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Proceedings Volume 12678, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXIII; 126780S (2023) https://doi.org/10.1117/12.2676138
Event: SPIE Optical Engineering + Applications, 2023, San Diego, California, United States
Abstract
Errors in grating fabrication contribute to ghosting and reduce efficiency, decreasing the signal-to-noise ratio of observations. It has historically been challenging to quantify fabrication errors across large areas using common tools such as scanning electron microscopes due to time and automation constraints. Interferometry allows for direct, large area measurement of these characteristics as a metric for success. We present interferometric measurements of laminar which have been used to characterize and optimize EBL tool error (“stitch error”) over large areas and detail future measurements of the impact of KOH etching on the groove placement accuracy. Additionally we comment on future work replicating EBL gratings via nanoimprint lithography.
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(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.
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Cecilia R. Fasano, Casey DeRoo, Keri Hoadley, Jared Termini, and Fabien Grisé "Informing the fabrication of ultraviolet reflection gratings with interferometric measurements", Proc. SPIE 12678, UV, X-Ray, and Gamma-Ray Space Instrumentation for Astronomy XXIII, 126780S (27 September 2023); https://doi.org/10.1117/12.2676138
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KEYWORDS
Reflection gratings
Fabrication
Ultraviolet radiation
Blazed gratings
Electron beam lithography
Stellar interferometry
Astronomical interferometry
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