Research on platinum film resistance temperature sensing method

Cunbao Huang; Fengxiang Guo; Wei Sun; Xu Chai; Xueyu Zhang; Shousheng Liu; Guangsen Xia; Zhigang Gai

doi:10.1117/12.2682543

20 June 2023 Research on platinum film resistance temperature sensing method

Cunbao Huang, Fengxiang Guo, Wei Sun, Xu Chai, Xueyu Zhang, Shousheng Liu, Guangsen Xia, Zhigang Gai

Author Affiliations +

Proceedings Volume 12715, Eighth International Conference on Electronic Technology and Information Science (ICETIS 2023); 127150J (2023) https://doi.org/10.1117/12.2682543
Event: Eighth International Conference on Electronic Technology and Information Science (ICETIS 2023), 2023, Dalian, China

Abstract

As one of the seven basic units in the International System of Units (SI), the temperature quantity is also the most important physical parameter of the ocean. The development of high-performance temperature sensing technology methods and sensors to achieve high-precision measurement of ocean temperature and compensation of elemental parameters is an important guarantee to improve ocean monitoring technology and promote the development of ocean resources. In this paper, we use mask lithography method combined with magnetron sputtering method to study the effect of microstructure size parameters of platinum film resistors on their temperature sensing performance, such as temperature coefficient, measurement accuracy, etc. This experiment simply and accurately determines the effect of the length and width of the resistor wire on the measurement error and temperature coefficient (TCR) of the platinum film resistor, and achieves the preparation of high precision and high stability platinum film resistors by controlling the structural parameters of the platinum film resistor wire.

Citation Download Citation

Cunbao Huang, Fengxiang Guo, Wei Sun, Xu Chai, Xueyu Zhang, Shousheng Liu, Guangsen Xia, and Zhigang Gai "Research on platinum film resistance temperature sensing method", Proc. SPIE 12715, Eighth International Conference on Electronic Technology and Information Science (ICETIS 2023), 127150J (20 June 2023); https://doi.org/10.1117/12.2682543

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KEYWORDS

Platinum

Resistance

Resistors

Temperature metrology

Calibration

Photoresist materials

Lithography

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