PROCEEDINGS VOLUME 12750
SPIE PHOTOMASK TECHNOLOGY + EUV LITHOGRAPHY | 1-6 OCTOBER 2023
International Conference on Extreme Ultraviolet Lithography 2023
Editor(s): Patrick P. Naulleau, Paolo A. Gargini, Toshiro Itani, Kurt G. Ronse
Editor Affiliations +
IN THIS VOLUME

10 Sessions, 44 Papers, 23 Presentations, 17 Posters
Resist  (4)
OPC  (3)
Metrology  (3)
EUV Pellicle  (3)
Proceedings Volume 12750 is from: Logo
SPIE PHOTOMASK TECHNOLOGY + EUV LITHOGRAPHY
1-6 October 2023
Monterey, California, United States
Front Matter: Volume 12750
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275001 (2023) https://doi.org/10.1117/12.3021566
High-NA EUVL: Joint Session with Photomask and EUVL Conferences
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275002 (2023) https://doi.org/10.1117/12.2687703
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275003 (2023) https://doi.org/10.1117/12.2688230
EUV Process Technology
M. Pak, A. Dauendorffer, K. Nafus, A. Das, M. Hasan, P. R. Delgadillo
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275004 (2023) https://doi.org/10.1117/12.2686265
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275005 (2023) https://doi.org/10.1117/12.2687549
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275006 (2023) https://doi.org/10.1117/12.2685543
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275007 (2023) https://doi.org/10.1117/12.2687702
Resist
Aysegul Develioglu, Michaela Vockenhuber, Lidia van Lent-Protasova, Iacopo Mochi, Yasin Ekinci, Dimitrios Kazazis
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275008 (2023) https://doi.org/10.1117/12.2686250
Cong Que Dinh, Seiji Nagahara, Kanzo Kato, Shinichiro Kawakami, Yuhei Kuwahara, Soichiro Okada, Kayoko Cho, Hikari Tomori, Junji Nakamura, et al.
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275009 (2023) https://doi.org/10.1117/12.2687434
Keiyu Ou, Naohiro Tango, Toru Fujimori
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500A (2023) https://doi.org/10.1117/12.2687409
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500B (2023) https://doi.org/10.1117/12.2687461
OPC
Eunju Kim, Wooseok Kim, Jonggwan Lee, Seongjong Kim, Sukyong Lee, Nohong Kwak, Mincheol Kang, Yongchul Jeong, Myungsoo Hwang, et al.
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500C (2023) https://doi.org/10.1117/12.2687373
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500D (2023) https://doi.org/10.1117/12.2688029
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500E (2023) https://doi.org/10.1117/12.2687699
Metrology
C. Tarrio, S. Grantham, R. E. Vest, T. A. Germer, B. M. Barnes, S. L. Moffitt, B. J. Simonds, M. Spidell
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500F (2023) https://doi.org/10.1117/12.2686832
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500G (2023) https://doi.org/10.1117/12.2688355
Kiril Ivanov Kurteva, Guillermo Castro Luis, Juan M. Trujillo-Sevilla, Jan O. Gaudestad, Richard van Haren, Leon van Dijk, Ronald Otten
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500H (2023) https://doi.org/10.1117/12.2687605
Resist Fundamentals
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500I (2023) https://doi.org/10.1117/12.2687546
Hitomi Betsumiya, Yuqing Jin, Yuko Tsutsui Ito, Takahiro Kozawa, Kazuo Sakamoto, Makoto Muramatsu
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500J (2023) https://doi.org/10.1117/12.2687340
Oleg Kostko, Terry R. McAfee, Patrick Naulleau
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500K (2023) https://doi.org/10.1117/12.2687332
EUV Pellicle
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500L (2023) https://doi.org/10.1117/12.2686314
Jarkko Etula, Ahmed Soliman, Tuhin Ghosh, Bjørn Mikladal, Emma Salmi, Emile Van Veldhoven, Kirill Chernenko, Ilkka Varjos, Taneli Juntunen
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500M (2023) https://doi.org/10.1117/12.2686790
Yun-Yao Lin, Pei-Hsun Tsai, Kelvin Elphick, Ching-Ho Hsu, Dino K. L. Shieh, Feng Hao Chang, James C. C. Huang, Jerry C. Y. Chen, Vincent C. W. Wen
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500N (2023) https://doi.org/10.1117/12.2688127
Tools and Processes
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500O (2023) https://doi.org/10.1117/12.2687658
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500P (2023) https://doi.org/10.1117/12.2687558
Poster Session
Sascha Brose, Serhiy Danylyuk, Bernhard Lüttgenau, Ismael Gisch, Lars Lohmann, Jochen Stollenwerk, Carlo Holly
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500Q (2023) https://doi.org/10.1117/12.2683682
Yunsoo Kim, Dongmin Jeong, Seungho Lee, Jinho Ahn
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500R (2023) https://doi.org/10.1117/12.2685114
Zhao Liu
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500S (2023) https://doi.org/10.1117/12.2685359
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500T (2023) https://doi.org/10.1117/12.2686329
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500U (2023) https://doi.org/10.1117/12.2686602
Yuichi Nishimura, Yoshifumi Ueno, Shinji Nagai, Fumio Iwamoto, Kenichi Miyao, Hideyuki Hayashi, Takuya Ishii, Tamotsu Abe, Hiroaki Nakarai, et al.
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500V (2023) https://doi.org/10.1117/12.2686618
Kihun Seong, Yongkyung Kim, Hye-Young Kim, Sung Kyu Jang, Sangsul Lee, Jiho Kim, Jaeboong Choi, Hyun-Mi Kim, Seul-Gi Kim, et al.
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500W (2023) https://doi.org/10.1117/12.2686696
Maximillian Mueller, Terry McAfee, Patrick Naulleau, Dahyun Oh, Oleg Kostko
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500X (2023) https://doi.org/10.1117/12.2686929
Shinji Yamakawa, Tetsuo Harada, Takeo Watanabe
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500Y (2023) https://doi.org/10.1117/12.2687118
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 127500Z (2023) https://doi.org/10.1117/12.2687444
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275010 (2023) https://doi.org/10.1117/12.2687639
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275011 (2023) https://doi.org/10.1117/12.2687727
Masataka Mamizuka, Teruaki Kawajiri, Koji Suzuki, Yusuke Teramoto, Takahiro Shirai, Shunichi Morimoto, Hidenori Watanabe, Akihisa Nagano, Daisuke Yajima, et al.
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275012 (2023) https://doi.org/10.1117/12.2687785
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275013 (2023) https://doi.org/10.1117/12.2687920
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275014 (2023) https://doi.org/10.1117/12.2688116
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275015 (2023) https://doi.org/10.1117/12.2685766
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275016 (2023) https://doi.org/10.1117/12.2686285
Hye-Young Kim, Jun-Hyeok Jeon, Kihun Seong, Yongkyung Kim, Seul-Gi Kim, Hyun-Mi Kim, Hyeongkeun Kim, Ji-Beom Yoo
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275017 (2023) https://doi.org/10.1117/12.2687573
Yosuke Ohta, Atsushi Sekiguchi, Shinji Yamakawa, Tetsuo Harada, Takeo Watanabe, Hiroki Yamamoto
Proceedings Volume International Conference on Extreme Ultraviolet Lithography 2023, 1275018 (2023) https://doi.org/10.1117/12.2691211
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