On-chip fluorescence array sensor for chemical gas sensing

Bo Wang; He Li; Chang Chen; Jiangong Cheng

doi:10.1117/12.2687339

27 November 2023 On-chip fluorescence array sensor for chemical gas sensing

Bo Wang, He Li, Chang Chen, Jiangong Cheng

Author Affiliations +

Proceedings Volume 12771, Advanced Sensor Systems and Applications XIII; 127710P (2023) https://doi.org/10.1117/12.2687339
Event: SPIE/COS Photonics Asia, 2023, Beijing, China

Abstract

Silicon photonics technology provides an attractive solution for compact, low-cost multi-array detection for chemical sensing. An on-chip multi-channel fluorescence gas sensor has been developed on an integrated photonic platform. By the simultaneous excitation and collection with the same waveguide, online detection of illicit drug simulants Methylphenethylamine (MPEA), nerve agent simulants Diethyl Chlorophosphate (DCP), and carcinogenic gas Aniline (AN) have been achieved by one source and detector on the same chip. Thanks to the compatibility with the complementary metal–oxide semiconductor (CMOS) fabrication processes, this technology paves the way for future development of wearable fluorescence-based gas sensors with high sensitivity, low cost, and compact size.

(2023) Published by SPIE. Downloading of the abstract is permitted for personal use only.

Citation Download Citation

Bo Wang, He Li, Chang Chen, and Jiangong Cheng "On-chip fluorescence array sensor for chemical gas sensing", Proc. SPIE 12771, Advanced Sensor Systems and Applications XIII, 127710P (27 November 2023); https://doi.org/10.1117/12.2687339

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

;

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE