E-beam materials

Steve Lierman; Marta Hecht

doi:10.1117/12.3011305

10 October 2023 E-beam materials

Steve Lierman, Marta Hecht

Proceedings Volume 12806, Bay Area Chrome Users Society Symposium 1982; 1280608 (2023) https://doi.org/10.1117/12.3011305
Event: 2nd Annual BACUS Symposium, 1982, Santa Clara, CA, United States

Abstract

I'd like to begin this presentation by bringing you in focus with our improvements in the area of manufacturing E-beam photomask blanks.

Citation Download Citation

Steve Lierman and Marta Hecht "E-beam materials", Proc. SPIE 12806, Bay Area Chrome Users Society Symposium 1982, 1280608 (10 October 2023); https://doi.org/10.1117/12.3011305

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