Quartz substrates: options, life, quality

Dennis Gobbo

doi:10.1117/12.3011324

10 October 2023 Quartz substrates: options, life, quality

Dennis Gobbo

Author Affiliations +

Proceedings Volume 12807, Bay Area Chrome Users Society Symposium 1983; 128070A (2023) https://doi.org/10.1117/12.3011324
Event: 3rd Annual BACUS Symposium, 1983, Santa Clara, CA, United States

Abstract

At present, the production of the 64K devices has been accelerated. The R/D manufacturing of the 256K is almost complete and production has begun in the US and Japan. In the making of these types of VLSI, especially the 256K, quartz masks have been predominately used for wafer fabrication, utilizing the wafer stepper and project aligner. Also, the characteristics of the quartz glass with extremely low thermal expansion and high transmittance to DUV light, allows it to be used for contact printing.

Citation Download Citation

Dennis Gobbo "Quartz substrates: options, life, quality", Proc. SPIE 12807, Bay Area Chrome Users Society Symposium 1983, 128070A (10 October 2023); https://doi.org/10.1117/12.3011324

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